Optional Versions ? |
Default |
.NM |
.HV |
.UHV |
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.NM, Absolutely non-magnetic version; .HV, High vacuum version; .UHV, Ultra high vacuum version; |
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1 Bottom size*height |
65 × 65 mm × 12 mm |
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2 Main Material |
Stainless Steel |
Pure Ti |
Stainless Steel |
Stainless Steel |
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3 Cables & Connectors |
Standard shielded cable D-Sub 9 Connector |
Kapton enameled Wire, PEEK-2mm Pin |
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Motion parameters - space recommended mounting form I. (The following properties are measured in the recommended installation form) |
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4 Travel |
30 mm |
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5 MAX. Velocity |
~ 20 mm/s |
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6 Min. Step |
< 10 nm |
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7 Drive Frequency |
Max. 20 kHz (Super quiet movement) |
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Maximum horizontal 8 force |
2 N |
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9 Holding Force |
5 N |
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10 Full-travel pitch/yaw |
0.3 mrad / 0.2 mrad |
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Motion parameters - space recommended installation form II. (The following properties are measured in the recommended installation form) |
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11 Maximum vertical load |
2 N |
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12 Holding Force |
5 N |
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Sensing accuracy |
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13 Position Sensing Type |
- Resistance type sensing ( .R ) - Optical scale sensing ( .O ) |
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14 Position sensing range |
30 mm |
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15 Position sensing resolution |
- Resistance type sensing ( .R ), 100-200 nm - Optical scale sensing ( .O ), 10 nm ( default ),1nm ( option ) |